发明名称 Assembly comprising a radiation source, a reflector and a contaminant barrier
摘要 An assembly including a radiation reflector and a contaminant barrier is disclosed. The contaminant barrier is arranged to receive radiation from a radiation source and to reflect that radiation towards the radiation reflector, and the radiation reflector is arranged to reflect the radiation, received from the contaminant barrier, back towards the contaminant barrier.
申请公布号 US2008291406(A1) 申请公布日期 2008.11.27
申请号 US20070802258 申请日期 2007.05.21
申请人 ASML NETHERLANDS B.V. 发明人 SOER WOUTER ANTHON;WILHELMUS VAN HERPEN MAARTEN MARINUS JOHANNES
分类号 G03B27/42 主分类号 G03B27/42
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