| 摘要 |
PROBLEM TO BE SOLVED: To provide a plotting apparatus for reducing the number of graphics to be divided, and shortening a plotting time, and to provide its method. SOLUTION: The plotting apparatus 100 includes: a storage device 122 for storing a first kind of division graphic data where an arbitrary angle graphic with an angle except integral multiples of 45°is approximately divided into a plurality of first non-arbitrary angle graphics which are constituted of rectangles, have one-end sides with substantially the same prescribed widths, and have other sides orthogonally crossed with different lengths, and a second kind of division graphic data where the arbitrary angle graphic is approximately divided into a plurality of second non-arbitrary angle graphics which are different in division position from the plurality of first non-arbitrary angle graphics which are constituted of rectangles, have one-end sides with substantially the same prescribed widths, and have other sides orthogonally crossed with different lengths; and a plotting part 150 for plotting the plurality of first non-arbitrary angle graphics and the plurality of second non-arbitrary angle graphics on a sample 101 so as to superimpose both the graphics by the use of an electronic beam 200. Consequently, the highly accurate arbitrary angle graphics are plotted without substantially increasing the number of division. COPYRIGHT: (C)2009,JPO&INPIT
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