| 摘要 |
PROBLEM TO BE SOLVED: To provide new technique to decrease deviation in an imaging position caused by movement of a sample in the microscopic images of the sample to be picked up respectively under illuminating light of different wavelength regions. SOLUTION: A wavelength region selective illumination device 1 selects the light of a plurality of wavelength regions from a light source having spectral distribution of a wide band and emits it as illuminating light. A switching device 3 sequentially switches the wavelength regions of the illuminating light emitted by the wavelength region selective illumination device 1 and the illuminating light with which the sample 30 is irradiated by a prescribed number, and also repeatedly performs the successive switching by the prescribed number in the same order. An imaging apparatus 2 picks up the image of the sample surface-sequentially in synchronization with switching the wavelength region of the illuminating light. A controller 6 controls the switching device 3 according to prescribed input from an input device 7 to decrease the prescribed number in the successive switching of the wavelength region of the illuminating light. COPYRIGHT: (C)2009,JPO&INPIT
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