METHOD FOR MAKING ONE-DIMENSIONAL STRUCTURE ARRAY OR CROSSBAR STRUCTURE ON SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide an easy fabrication method for dense topographically smooth or coplanar nano-line arrays or nano-crossbar structures. SOLUTION: A dense topographically smooth or coplanar alternating line arrays is fabricated on a substrate, following the steps: (i) setting a substrate; (ii) setting a slits-having shadow mask 5 over the substrate in close proximity; (iii) feeding a raw material to deposit a first layer on the substrate; (iv) moving the shadow mask relative to the substrate by a defined distance rectangular to the length direction of the slits, keeping parallel to the substrate; (v) feeding another raw material to deposit a second layer on the substrate; (vi) moving the shadow mask relative to the substrate by a defined distance rectangular to the length direction of the slits, keeping parallel to the substrate; and (vii) repeating the above steps (iii)-(vi) until the total moved distance of the shadow mask or the substrate reaches the slits' pitch. COPYRIGHT: (C)2009,JPO&INPIT