| 摘要 |
PROBLEM TO BE SOLVED: To provide a recharge apparatus for a silicon single crystal pulling apparatus in which the weight of a hopper main body is prevented from applying to a bottom lid, a lump material is prevented from not falling from the inside of the hopper main body and the lump material and a metal material are not directly coming into contact with each other, and which can be easily operated and has no sliding part between metals. SOLUTION: The recharge apparatus is equipped with: a first stopper 64 which is provided in the hopper main body 32 and retains the hopper main body 32 at a predetermined position above a crucible 20; a second stopper 70 which is provided on a suspending rod 72 and retains the hopper main body 32; a nearly cylindrical quartz tube 78 for covering the suspending rod 72; and a rotation stopper 62 provided in the hopper main body 32. COPYRIGHT: (C)2009,JPO&INPIT
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