| 摘要 |
PROBLEM TO BE SOLVED: To provide a thickness measuring instrument for simply and accurately measuring the thickness-wise dimension of a measured object, the dimension being used for calculation, etc. of thermal diffusivity, with a contacting part kept in contact with the measured object perpendicularly by desired pressure contact force at all times independently of a measurer's skill. SOLUTION: When a vertically-movable body 31 is let down by rotative driving of a Z-direction drive stepping motor 39 with the measured object 8 mounted on the top face of a mounting surface 14, the contacting part 47 provided on an end of a measurement arm part 45 makes contact with the measured object 8 to upward rock the arm part 45 by reactive force with the measured object 8 sandwiched between the contacting part 47 and the mounting surface 14. Capacitance of a balance capacitor 50 provided at a portion with a horizontal shaft 44 pivotally mounted thereon is varied in accordance with the rocking motion of the arm part 45. When a measurement value reaches a domain where balance is acquired with a difference being zero, a control part 81 sends out a control signal for stopping the letting-down of the vertically-movable body 31 to the stepping motor 39. COPYRIGHT: (C)2009,JPO&INPIT
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