发明名称 |
Antireflective Coating Composition Comprising Fused Aromatic Rings |
摘要 |
The present invention relates to an organic spin coatable antireflective coating composition comprising a polymer comprising at least one unit with 3 or more fused aromatic rings in the backbone of the polymer and at least one unit with an aliphatic moeity in the backbone of the polymer. The invention further relates to a process for imaging the present composition.
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申请公布号 |
US2008292995(A1) |
申请公布日期 |
2008.11.27 |
申请号 |
US20070872962 |
申请日期 |
2007.10.16 |
申请人 |
HOULIHAN FRANCIS;ABDALLAH DAVID;RAHMAN M DALIL;MCKENZIE DOUGLAS;ZHANG RUZHI;TIMKO ALLEN G;KIM WOOKYU;LU PING-HUNG |
发明人 |
HOULIHAN FRANCIS;ABDALLAH DAVID;RAHMAN M. DALIL;MCKENZIE DOUGLAS;ZHANG RUZHI;TIMKO ALLEN G.;KIM WOOKYU;LU PING-HUNG |
分类号 |
G03F7/26;G03F5/00 |
主分类号 |
G03F7/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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