| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an optical component of synthetic quartz glass optimized with respect to compaction and central birefringence. <P>SOLUTION: The production method for an optical component of synthetic quartz glass includes subjecting a quartz glass blank to a multistage annealing treatment comprising the processes of: (a) a first treatment phase during which the quartz glass blank is treated in an upper temperature range between 1,130°C and 1,240°C; (b) cooling the quartz glass blank at a first-higher-mean cooling rate to a quenching temperature below 1,100°C, a fictive temperature with a high mean value of 1,100°C or more being reached in the quartz glass; and (c) a second treatment phase which comprises cooling of the quartz glass blank at a second-lower-mean cooling rate, and in which the quartz glass blank is treated in a lower temperature range between 950°C and 1,100°C such that a fictive temperature is reached in the quartz glass with a low mean value which is at least 50°C lower than the high mean value of the fictive temperature according to the process (b). <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
