ION GENERATOR

摘要

An ion source is provided to prevent the electric short from being generated by improving the fixed method of cathode and the fixed method of repeller. An ion source comprises the case which limits the arc chamber while having the cathode surface(104) in which the hole is built up; the cathode plate(106) which is located apart from the cathode surface; the insulator(108) fixing the cathode plate to the cathode surface; the cathode connected with the cathode plate. The insulator is positioned between the cathode surface and the cathode plate. The quality of the cathode plate is graphite. The circular shape of hole is formed in the cathode plate.