Monochromator and charged particle beam source with monochromator

摘要

The monochromator (1) has deflection elements (2,8) formed in such a manner that it deviates from a spherical form. The load particle differently focused in such a manner that different sections in each case enter virtually into the picture of the radiation source (17) under an angle. The focusing point of energy of load particle comes to a level (5) of the selection screen (6).