发明名称 Method for making a rare earth oxide-containing sprayed plate
摘要 A rare earth oxide-containing sprayed plate is prepared by thermally spraying a rare earth oxide on a support to a thickness of up to 5 mm and peeling the sprayed coating from the support. Thin plates of rare earth oxide ceramics can be prepared without molding, firing and sintering steps.
申请公布号 EP1995343(A2) 申请公布日期 2008.11.26
申请号 EP20080009114 申请日期 2008.05.16
申请人 SHIN-ETSU CHEMICAL CO., LTD. 发明人 HAMAYA, NORIAKI;NAKAMURA, KOJI;IIDA, RYOJI
分类号 C23C4/06;C23C4/10;C23C4/18 主分类号 C23C4/06
代理机构 代理人
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