| 摘要 |
The invention concerns the combination of optical elements with active optoelectronic to monolithic optoelectronic systems. An optoelectronic wafer ( 1 ) comprising active optical components ( 2 ) is provided with (micro-)optical structures. The optical structures ( 12, 13 ) are allocated to the active optical components ( 2 ), i.e. they are configured to influence light impinging on the active optical components ( 2 ) and/or originating from them in a desired manner. To this end they are either aligned to the optical components or otherwise adjusted to serve this purpose. The combined active optical components/optical structures are separated for example by dicing the semiconductor wafer with the optical structures into parts containing at least one active optical component ( 2 ) and at least one optical structure ( 12, 13 ).
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