| 摘要 |
A track rail is formed in a channel-like configuration while having a guide passage for sliders. A table structure that moves within the guide passage includes: a pair of sliders that move forwards and backwards within the guide passage; and a connecting top board connecting those sliders to each other with a predetermined interval therebetween and provided with a mounting surface for a movable member. An armature constituting a linear motor is received between the pair of sliders, and field magnets constituting the linear motor are arranged in the track rail so as to face the guide passage. The armature and the field magnets, which constitute the linear motor, are completely integrated with the table structure and the track rail, which constitute a linear guide, and are entirely contained inside the linear guide.
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