CLEANING UNIT OF TRANSFERRING MEMBER AND APPARATUS FOR PROCESSING SUBSTRATES HAVING THE SAME

摘要

The cleaning unit is provided to close the opened site of the cleaning bath from outside when washing a chuck and a chuck holder of the transport unit. The cleaning unit(400) of a transfer member comprises as follows. A chuck is to chuck(420) supports a substrate. The first showerhead sprays the washing solution to the chuck among the transport unit(300) including(310) the holder. The second showerhead(430) sprays the washing solution to the chuck holder among the transport unit. The cleaning bath(410) collects the washing solution emitted from the first showerhead and the washing solution emitted from the second showerhead(410). The washing solution is emitted from the first showerhead. The cover unit(440) prevents the washing solution emitted from the second showerhead from leaking to outside.