| 摘要 |
A system for processing a substrate is provided to increase its productivity by reducing the conveying time of a substrate and to minimize its device installment costs by reducing an area and width of a system. A substrate processing system includes: a process chamber(200) which has a first substrate entrance; substrate supporters(210) which are installed at the process chamber; and a first conveying apparatus which is placed at the process chamber and conveys a substrate to the substrate supporter. The substrate supporters are arranged radially about the center of the process chamber.
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