| 摘要 |
A vibrator module includes a frame having an outer frame and an inner frame. A vibrator unit is formed inside the inner frame. The frame and the vibrator unit are formed of a piezoelectric ceramic or the like as one piece. On one side of the vibrator unit, an IC is mounted so that a hollow portion is provided between the vibrator unit and the IC. The periphery of the IC is filled with a resin material. On the other side of the vibrator unit, a top cover serving as a sealing material is mounted so that a hollow portion is provided between the vibrator unit and the top cover.
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