LAYOUT DESIGN AND ASSEMBLY OF SDA MICRO MOTOR FOR LOW DRIVE VOLTAGE AND LONG LIFE APPLICATION

摘要

PROBLEM TO BE SOLVED: To provide a novel design and a manufacturing method for a scratch drive actuator (SDA) having a low drive voltage and long life characteristics.

SOLUTION: In order to reduce the AC amplitude of a drive voltage from 30-150 Vo-p to 12-30 Vo-p, a silicon wafer of super-low resistance (<0.004Ω-cm) is employed as the substrate of an SDA micro motor. A novel SDA structure and a profile design method which improve the lifetime (>75 hours) and the rotational speed (below 30 r.p.m.) of an SDA micro motor are also provided.

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