发明名称 WATERPROOFING PLUG FOR SUBSTRATE STORING CONTAINER, CLEANING METHOD FOR SUBSTRATE STORING CONTAINER
摘要 PROBLEM TO BE SOLVED: To provide a waterproof plug, a substrate storing container, and a cleaning method therefor, allowing cleaning, with water content hard to remain after cleaning, for easy drying. SOLUTION: One end of a plug body part 25 includes a seal formation part 26 which seals the communication part of a substrate storing container, and the other end includes a connection part 27 formed in oval and a plug sidewall part 28 having, at its tip, a hooking flange 29 continuous to the connection part 27. A waterproof plug 24 includes the plug sidewall part 28 formed on the outside of the plug body 25 for elastic deformation, and the hooking flange 29 at the tip of the plug sidewall part 28 to protrude outward. It is preferrable that the hooking flange 29 be engage with a bottom plate through hole 23 provided to a bottom plate 4. The seal formation part 26 is integrally formed with the plug body 25 by two-color molding. A container structure is characterized by having a structure for detachable waterproof plug in water-tight. In cleaning the substrate storing container, the waterproof plug is attached in water-tight and is put in a washing bath. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008282982(A) 申请公布日期 2008.11.20
申请号 JP20070125684 申请日期 2007.05.10
申请人 SHIN ETSU POLYMER CO LTD 发明人 SATO YOSHINORI
分类号 H01L21/673;B65D85/86;H01L21/304 主分类号 H01L21/673
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