发明名称 SUBSTRATE PROCESSING SYSTEM AND DATA RETRIEVAL METHOD
摘要 <p><P>PROBLEM TO BE SOLVED: To rapidly perform data retrieval and display by a GUI terminal without increasing the load of data retrieval processing in a group administration apparatus even with an increase in the number of apparatuses and GUI terminals. <P>SOLUTION: The data transmitted by the apparatus 2 are classified for each group by a group administration apparatus 3. Thus, for example, in the case of displaying temperature information by a GUI terminal 4, a temperature information group is set into a retrieval condition for each item of display items, and a temperature setting value and a temperature monitor value are set for each type. Then, these are transferred to the group administration apparatus 3. The group administration apparatus 3 refers to the retrieval conditions of a plurality of display items that are acquired from the GUI terminal 4 to merge the display items with the same conditions into one item as a retrieval item. Thereby, the acquisition of data is permitted by the request on a group unit to the data stored in the group administration apparatus 3, so as to reduce the number of retrievals of apparatus data. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2008283169(A) 申请公布日期 2008.11.20
申请号 JP20080033987 申请日期 2008.02.15
申请人 HITACHI KOKUSAI ELECTRIC INC 发明人 KOSUMAKI TOSHIAKI
分类号 H01L21/02;G05B19/418 主分类号 H01L21/02
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