| 摘要 |
PROBLEM TO BE SOLVED: To form a polymer thin film, homogeneous and excellent in optical characteristics at low costs. SOLUTION: A voltage is applied between a nozzle 30 and a target substrate 60 with a direct current power source 50, and a polymer solution 20 consisting of a polymer material dispersed in a solvent is discharged from the nozzle 30. The discharged polymer solution 70 reaches the target 60 to form a polymer film. A solvent of a high boiling point is used as the polymer solution 20, and the concentration of the polymer material is adjusted so as to level the polymer solution film 70 on the target substrate 60. COPYRIGHT: (C)2009,JPO&INPIT
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