发明名称 |
Vacuum Divider for Differential Pumping of a Vacuum System |
摘要 |
A vacuum divider is positioned between rotor blades of a turbo-molecular pump and a vacuum manifold formed from multiple vacuum chambers. A first coupling aperture passes through the vacuum divider and allows gas to pass from a first of the multiple vacuum chambers to the turbo-molecular pump. A second coupling aperture passes through the vacuum divider and allows gas to pass from a second of the multiple vacuum chambers to the turbo-molecular pump.
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申请公布号 |
US2008283125(A1) |
申请公布日期 |
2008.11.20 |
申请号 |
US20070749083 |
申请日期 |
2007.05.15 |
申请人 |
AGILENT TECHNOLOGIES, INC. |
发明人 |
MORDEHAI ALEXANDER;WERLICH MARK |
分类号 |
G05D11/00 |
主分类号 |
G05D11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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