发明名称 |
SHAPE CONTROLLED GROWTH OF NANOSTRUCTURED FILMS AND OBJECTS |
摘要 |
A method and apparatus for growing nanostructures is presented. A growth substrate including at least one reaction site is provided as is a device disposed proximate the growth substrate. Energy is provided to the reaction site and a reaction species is introduced to the growth substrate. This results in a nanostructure growing from the reaction site wherein the growth process of the nanostructure is controlled by providing a force to the device. |
申请公布号 |
WO2008054379(A3) |
申请公布日期 |
2008.11.20 |
申请号 |
WO2006US41810 |
申请日期 |
2006.10.25 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY;HART, ANASTASIOS JOHN;SLOCUM, ALEXANDER HENRY |
发明人 |
HART, ANASTASIOS JOHN;SLOCUM, ALEXANDER HENRY |
分类号 |
H01L21/469;B82B1/00;B82B3/00;H01L29/06 |
主分类号 |
H01L21/469 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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