发明名称 SHAPE CONTROLLED GROWTH OF NANOSTRUCTURED FILMS AND OBJECTS
摘要 A method and apparatus for growing nanostructures is presented. A growth substrate including at least one reaction site is provided as is a device disposed proximate the growth substrate. Energy is provided to the reaction site and a reaction species is introduced to the growth substrate. This results in a nanostructure growing from the reaction site wherein the growth process of the nanostructure is controlled by providing a force to the device.
申请公布号 WO2008054379(A3) 申请公布日期 2008.11.20
申请号 WO2006US41810 申请日期 2006.10.25
申请人 MASSACHUSETTS INSTITUTE OF TECHNOLOGY;HART, ANASTASIOS JOHN;SLOCUM, ALEXANDER HENRY 发明人 HART, ANASTASIOS JOHN;SLOCUM, ALEXANDER HENRY
分类号 H01L21/469;B82B1/00;B82B3/00;H01L29/06 主分类号 H01L21/469
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