Ion source i.e. anode layer ion source, for e.g. coating in vacuum, has cathode arrangement with emission gap having endless basic shape that superimposes lateral substructure for enlargement of elongate length of emission gap

摘要

The source has a magnet arrangement arranged in a housing and generating a magnetic field. A cathode arrangement has an emission gap with an endless basic shape e.g. circle, which is geometrically similar to an edge of the magnet arrangement, for sending ions with a central line. The cathode arrangement has two edges subsequent to a distribution of the central line, and enables a closed thermoionic drift. The basic shape of the emission gap superimposes a lateral substructure for enlargement of an elongate length of the emission gap.