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发明名称
摘要
申请公布号	JP2008541453(A)	申请公布日期	2008.11.20
申请号	JP20080511236	申请日期	2006.05.09
申请人		发明人
分类号	H01L21/3205;G09F9/30;H01L23/52	主分类号	H01L21/3205
代理机构		代理人
主权项
地址

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