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发明名称
Methode zur Optimierung des diffraktiven optischen Elements (DOE) zum Abgleich des optischen Naheffekts (OPE) zwischen verschiedenen Lithographiesystemen
摘要
申请公布号
DE602005010166(D1)
申请公布日期
2008.11.20
申请号
DE200560010166T
申请日期
2005.08.25
申请人
ASML MASKTOOLS B.V.
发明人
PARK, SANGBONG;CHEN, JANG FUNG;LIEBCHEN, ARMIN
分类号
G03F7/20
主分类号
G03F7/20
代理机构
代理人
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地址
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