retainer ring structure for chemical-mechanical polishing machine and mounting method thereof,申请号KR20070082103-传众专利搜索

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发明名称	retainer ring structure for chemical-mechanical polishing machine and mounting method thereof
摘要
申请公布号	KR100869549(B1)	申请公布日期	2008.11.19
申请号	KR20070082103	申请日期	2007.08.16
申请人		发明人
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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