发明名称
摘要 <p>PROBLEM TO BE SOLVED: To provide a liquid material discharger which can surely discharge a predetermined amount of a liquid material in a short time and in addition can rapidly, easily and reliably exchange the liquid material. SOLUTION: The liquid material discharger comprises a supply port with which a liquid material supply container can be connected, a discharge port for discharging a liquid material, a channel for making the supply port communicate with the discharge port, an open/close mechanism provided for opening/ closing the supply port and the discharge port, and a piston provided on the channel between the supply port and the discharge port. It has a communication channel where no liquid material stops on the channel.</p>
申请公布号 JP4183411(B2) 申请公布日期 2008.11.19
申请号 JP20010338445 申请日期 2001.11.02
申请人 发明人
分类号 B67D7/02;F04B53/06;H01L21/56 主分类号 B67D7/02
代理机构 代理人
主权项
地址