| 摘要 |
The present invention provides a piezoelectric thin film element with superior piezoelectric properties in which the condition of the crystal of the piezoelectric thin film is appropriately controlled, and a manufacturing method thereof, as well as a inkjet recording head, inkjet printer, or other liquid ejecting apparatus employing the same. The piezoelectric thin film element 40 comprises a top electrode 44 , a bottom electrode 42 , and a piezoelectric thin film 43 formed between the top electrode 44 and the bottom electrode 42 , wherein the piezoelectric thin film 43 is structured so as to comprise a first layer 431 located nearest to the bottom electrode and second layers ( 433-436 ) that are located nearer to the top electrode than the first layer and that have thicknesses greater than that of the first layer 431. |
