Cantilever assembly and process of manufacturing the same

摘要

A cantilever assembly (1) for scanning a sample comprises a cantilever (10) having a cantilever tip (11). The cantilever is mounted to a rigid support (12, 120, 121) and comprises a step-like portion (100) which is arranged near that end of the cantilever (10) which is attached to the support, said step-like portion (100) substantially increasing the thickness of the cantilever (10) on the front side of the cantilever (10).