| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor capable of accurately measuring a physical quantity such as angular velocity etc. by detecting the displacement of a detecting oscillator with high sensitivity and accuracy. <P>SOLUTION: The sensor comprises: a detecting oscillator 204 supported in such a manner that it is allowed to oscillate; first and second electrodes; a detecting electrode facing the first and second electrodes; and signal supplying means 214 and 215 for supplying first and second AC signals respectively to the first and second electrodes. Either the first and second electrodes or the detecting electrode is provided on the detecting oscillator 204. The signal supplying means 214 and 215 supply the first and second electrodes with the first and second AC signals respectively that hold the detecting oscillator 204 at a neutral position for detection without displacement. When the detecting oscillator 204 is displaced, the sensor detects a physical quantity based on a signal of the induced charge induced to the detecting electrode 204 by the first and second AC signals supplied respectively to the first and second electrodes. <P>COPYRIGHT: (C)2009,JPO&INPIT |
