发明名称 |
METHOD AND SYSTEM FOR FACILITATING PREVENTIVE MAINTENANCE OF AN OPTICAL INSPECTION TOOL |
摘要 |
A method of determining preventive maintenance for an optical inspection system for inspecting photolithography processed substrates. The method includes measuring at least one operational characteristic of the optical inspection system and comparing a measurement result for said at least one operational characteristic with predetermined preventive maintenance criteria for the operational characteristic. Also included is determining a preventive maintenance requirement based on a comparison result of said comparing, and initiating a preventive maintenance action on said optical inspection system, said preventive maintenance action corresponding to said preventive maintenance requirement. A method of automatically performing preventive maintenance on an optical inspection system, and for retrofitting an optical inspection system to facilitate preventive maintenance of the optical inspection system are also disclosed. |
申请公布号 |
WO2008042572(A3) |
申请公布日期 |
2008.11.13 |
申请号 |
WO2007US78349 |
申请日期 |
2007.09.13 |
申请人 |
TOKYO ELECTRON LIMITED;DIXON, DAVID;KINCAID, MICHAEL |
发明人 |
DIXON, DAVID;KINCAID, MICHAEL |
分类号 |
G03B27/72 |
主分类号 |
G03B27/72 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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