发明名称 Zweischeiben-Poliermaschine, insbesondere zur Bearbeitung von Halbleiterwafern
摘要 Support discs (14,164) are attached in cyclic rings (24,190) of wheel-shaped support bases (18,166) by fixing tool. Radius of support bases is half of width of respective ring shape grinding discs (10,162). When grinding discs are contacted with processed object, base (166) is connected to drive shaft and support disc (164), so that inclination of discs (10,162) are equal.
申请公布号 DE10007390(B4) 申请公布日期 2008.11.13
申请号 DE2000107390 申请日期 2000.02.18
申请人 PETER WOLTERS GMBH 发明人 BOLLER, HANS-PETER
分类号 B24B37/04;B24B37/08;B24B55/02;H01L21/304;H01L21/306 主分类号 B24B37/04
代理机构 代理人
主权项
地址