发明名称 SEMICONDUCTOR DEVICE, SEMICONDUCTOR WAFER STRUCTURE AND METHOD FOR MANUFACTURING THE SEMICONDUCTOR WAFER STRUCTURE
摘要 There is provided a semiconductor device including, a semiconductor substrate having a circuit forming region and a peripheral region, a base insulating film formed over the semiconductor substrate, a capacitor formed of a lower electrode, a capacitor dielectric film made of a ferroelectric material, and an upper electrode in this order over the base insulating film in the circuit forming region, an uppermost interlayer insulating film formed over the capacitor, a seal ring formed over the semiconductor substrate in the peripheral region, the seal ring having a height that reaches at least the upper surface of the interlayer insulating film, and surrounding the circuit forming region, a block film formed over the seal ring and over the interlayer insulating film in the circumference of the seal ring, and an electrode conductor pattern which is formed over the interlayer insulating film in the peripheral region, the electrode conductor pattern having an electrode pad, and having a cross-section exposed to a dicing surface.
申请公布号 US2008277705(A1) 申请公布日期 2008.11.13
申请号 US20080175039 申请日期 2008.07.17
申请人 FUJITSU LIMITED 发明人 TAKAHASHI YASUFUMI;KAJIO KENICHIRO
分类号 H01L29/92;H01L21/02 主分类号 H01L29/92
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