CLEANING APPARATUS FOR PROBE

摘要

The end of the probe is not worn away by the cleaning of probe because a foreign material including abrasive such as Al chip attached at the tip of the probe is removed without using a surface layer. The probe assembly(10) is equipped with the print circuit board(16), and the probe substrate(18) overlapped on the print board. The probe substrate is made of the laminator and the multilayer wiring board(18b) adhering with the ceramic plate(18a). A plurality of probes(20) are arranged on the multilayer wiring board of the probe substrate.