| 摘要 |
PROBLEM TO BE SOLVED: To provide inexpensively an inspection device and an observation device capable of inspecting and observing an inspection object having a periodical pattern without generating almost no fading or deterioration of an image, and without being influenced by moire even under the condition that the pattern period is close to CCD resolution. SOLUTION: This inspection device for inspecting optically the inspection object having the periodical pattern has an imaging element for imaging an image of the inspection object; an optical system having a light separation means for diving at least light from the inspection object by reflection and transmission and a light guide means for guiding each divided light, and thereby guiding two images of the inspection object into the imaging element; and an imaging position shifting means for shifting the position on the imaging element of at least either image between the two images of the inspection object. COPYRIGHT: (C)2009,JPO&INPIT
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