发明名称 OPTICAL DEVICE AND EXPOSURE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide an optical device capable of suppressing a decrease in light output, and to provide an exposure device. <P>SOLUTION: The optical device 10 includes a laser light source 12 which emits laser light of short wavelength range (for example, 160 to 500 nm), a lens 14, a transparent member 16, and an optical fiber 18 formed with a bonding impediment film 17. Furthermore, the optical device is configured so that light density on a contact surface 20 between the transparent member 16 and the optical fiber 18, having bonding impediment film 17 formed, is &le;4464 [W/mm<SP>2</SP>] or smaller. <P>COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2008276008(A) 申请公布日期 2008.11.13
申请号 JP20070121102 申请日期 2007.05.01
申请人 FUJIFILM CORP 发明人 MUKAI ATSUSHI;SONODA SHINICHIRO
分类号 G02B6/42;G03F7/20;H01L21/027;H01S5/022 主分类号 G02B6/42
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