| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a variable shape mirror wherein a desired mirror surface shape can be obtained while a manufacturing cost is suppressed. <P>SOLUTION: The variable shape mirror 1 is provided with a base 2, a mirror substrate 3 disposed to face the base 2 and having a mirror surface 3a formed on a surface to face a surface opposite to the base 2, struts 4 disposed on the base 2 and supporting the mirror substrate 3 and a piezoelectric actuators 5 having piezoelectric bodies expanded and contracted by application of voltage, disposed on the base 2 and displacing variable parts which are not joined to the struts 4 of the mirror substrate 3. The piezoelectric actuators 5 are formed to be higher than the struts 4 by a prescribed height while no voltage is applied and the amount of the prescribed height is larger than the maximum amount of distortion generated in the mirror surface 3a by joining the mirror substrate 3 to the struts 4. <P>COPYRIGHT: (C)2009,JPO&INPIT |
