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发明名称
摘要
申请公布号	JP4179805(B2)	申请公布日期	2008.11.12
申请号	JP20020159997	申请日期	2002.05.31
申请人		发明人
分类号	H01L21/52;H01S5/022	主分类号	H01L21/52
代理机构		代理人
主权项
地址

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