发明名称 METHOD OF PRODUCING EPITACTIC SEMICONDUCTOR LAYERS ON FOREIGN SUBSTRATES
摘要 A method of producing thin, monocrystalline layers of semiconductor material, upon a monocrystalline, preferably wafer-shaped, substrate body of another chemical composition, but having the same or a similar lattice structure, by an epitactic growth process. The substrate body is immersed into a melt comprising the appropriate semiconductor material. A temperature balance between the substrate body and the melt, is established. Thereafter the semiconductor material epitactically grown on the surface of the substrate body, by slowly pulling the substrate body out from the melt.
申请公布号 US3650822(A) 申请公布日期 1972.03.21
申请号 USD3650822 申请日期 1969.09.25
申请人 SIEMENS AG. 发明人 JOSEF GRABMAIER
分类号 C30B15/00;C30B15/32;C30B19/00;C30B29/40;H01L21/208;H01L21/86;H01L27/12;(IPC1-7):B44D1/18;H01L7/40 主分类号 C30B15/00
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