SURFACE MEASUREMENT APPARATUS

摘要

The precision is improved even when measuring the large area to be the superhigh speed. The surface measurement apparatus in which the measurement of three dimensional shape is possible can be provided. The light source is for irradiating the laser beam(L). A rotating reflection mirror is for irradiating the laser beam on one-way. The first optical system(214) receives the laser beam from the rotating reflection mirror and scan the measurement object. The beam(Ls) is reflected to the rotating reflection mirror. The second optical system(215) have the fixed beam path. One or more reflected beam detection unit detects the beam reflected with the rotating reflection mirror.