ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING THE SAME

摘要

The electrostatic chuck and the method of manufacturing the electrostatic chuck are provided to achieve high reliability of the adsorption. The electrode is for applying voltage. The electrostatic absorption part includes the insulating layer of the film type covering electrode. The process is for setting up the electrostatic absorption part. The process is for bonding the elastomer layer(102) in the electrostatic absorption part. The process is for bonding the metallic base(101) and elastomer layer so that the concave part formed in the side of metallic base faces with the elastomer layer. The concave part is formed with the grid type. The process is for pressurizing the elastomer layer on the metallic base with the roller laminator. The process is for pressurizing the elastomer layer on the metallic base under the decompression environment.