发明名称 Method for improving Mg doping during group-III nitride MOCVD
摘要 A method for improving Mg doping of Group III-N materials grown by MOCVD preventing condensation in the gas phase or on reactor surfaces of adducts of magnesocene and ammonia by suitably heating reactor surfaces between the location of mixing of the magnesocene and ammonia reactants and the Group III-nitride surface whereon growth is to occur.
申请公布号 US7449404(B1) 申请公布日期 2008.11.11
申请号 US20050115685 申请日期 2005.04.26
申请人 SANDIA CORPORATION 发明人 CREIGHTON J. RANDALL;WANG GEORGE T.
分类号 H01L21/28 主分类号 H01L21/28
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