| 摘要 |
<p>At the first step A, a transfer position measured actually by a measuring/inspecting instrument is shown by a black circle. A target transfer position shown by 5 at step B is located at the same position as that of the black circle. Assuming the weights at the subsequent steps are identical, a target transfer position Xtarget shown by 5 at each of steps C, D and E is located at a moderate position where a total deviation from an actual transfer position (black circle) measured at the step preceding that layer by the measuring/inspecting instrument is minimized, i.e. a proper position for a plurality of other steps. Consequently, productivity of a device can be enhanced.</p> |
