| 摘要 |
PROBLEM TO BE SOLVED: To provide the method of manufacturing a micro transformer, which improves throughput, prevents a crack from entering an insulating film between coils, and the micro transformer can be manufactured without the use of a mask material the selection ratio of which is large. SOLUTION: An insulating film 3 is deposited on the entire surface of a semiconductor substrate 1 on a part of which an impurity diffusion region 2 is formed. A first opening portion 4 and a second opening portion 5 are formed by removing a part of the insulating film 3. Then, a first coil 7 is formed so that a center pad 8 comes into contact with the impurity diffusion region 2 via the first opening portion 4. Then, a thin insulating film 10 is deposited on the first coil 7. An insulator material 12 is pasted onto the insulating film 10 at a first coil side by use of adhesion tape 13. Then, a second coil 15 is formed on the surface of the insulator material 12. COPYRIGHT: (C)2009,JPO&INPIT
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