| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a wire grid polarizing plate, with which a wire grid polarizing plate having a fine protruding and recessing grid is obtained, while suppressing adhesion of a metal to wall surfaces of the protruding parts of the protruding and recessing grid. SOLUTION: When an angle, in a plane perpendicularly intersecting the longitudinal direction of grid-shaped protruding parts, between a normal to a substrate surface and a metal adhering direction is represented byθ, the angle at the start of adhesion byθd, and the angle at the finish of adhesion byθs with respect to the grid-shaped protruding parts on the substrate surface, the manufacturing method of the wire grid polarizing plate is characterized in that the metal wires are formed on the substrate having the grid-shaped protruding parts by sequentially adhering the metal thereto from the larger angle direction out of two or more angles in an angular range betweenθs andθd. COPYRIGHT: (C)2009,JPO&INPIT
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