| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric thin-film element containing a potassium sodium niobate thin film having excellent piezoelectric characteristics. <P>SOLUTION: The piezoelectric thin-film element 8 has a structure in which at least a lower electrode 2 such as platinum, a piezoelectric thin-film 3 having a perovskite structure represented by general formula (K<SB>x</SB>Na<SB>1-x</SB>)NbO<SB>3</SB>(0<x<1) and having a film thickness of 0.2-10μm, and an upper electrode 4 such as platinum are disposed on a substrate 1, wherein the composition of K, Na and Nb in the piezoelectric thin-film 3 satisfies the relation 1.15<(K+Na)/Nb<1.50. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
