| 摘要 |
An object of the present invention is to provide a semiconductor acceleration sensor capable of sensing accelerations in two directions parallel to the surface of a diaphragm and orthogonal to each other with respective proper sensitivities. There is constructed a semiconductor acceleration sensor 10 constituted of diaphragm pieces 13 a to 13 d extending from the center of the diaphragm surface to a wafer outer-circumferential frame section 12 a, respectively, along an X axis direction and a Y axis direction orthogonal to each other. On the upper surface of the diaphragm pieces, there are formed piezo resistors Rx 1 to Rx 4 , Ry 1 to Ry 4 , Rz 1 to Rz 4 . In the diaphragm pieces 13 a and 13 b disposed on a single line along the X axis direction and the diaphragm pieces 13 c and 13 d disposed on a single line along the Y axis direction, the areas of cross section orthogonal to the axis are set according to a maximum value of acceleration, respectively, in the X axis direction or Y axis direction.
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