SEMICONDUCTOR WAFER'S MANUFACTURING APPARATUS

摘要

The semiconductor wafer processing system is provided to prevent the contamination of the lower part bottom surface of wafer and the support stand due to developer. The semiconductor wafer processing system includes the driving unit(4) in which the support stand(2) fixing the semiconductor wafer is connected; the protection element(6) in which the support stand is connected through the central part; the cut off block(8) spraying the cooling gas and cools the support stand and semiconductor wafer; the supply part of cooling gas supplying the cooling gas to the cut off block. The cut off block is mounted on the central part of the protection element and is installed at the lower part of the support stand.