EXPOSURE SYSTEM AND CIRCUIT BOARD FOR LASER CONTROL SECTION

摘要

PROBLEM TO BE SOLVED: To provide an exposure system which can regulate the quantity of laser to a predetermined level without requiring a calibration sensor.

SOLUTION: In the exposure system comprising a laser control section consisting of an independently replaceable circuit board and controlling the emission of laser light from a laser light emitting section under control of a main control section performing general operation control of the whole device, error adjustment information for adjusting the gap of a control factor resulting from the circuit error of the circuit board previously acquired for the circuit board is stored in a memory in the laser control section prior to mounting the circuit board on the exposure system. Upon receiving a control designation for emitting laser light with a predetermined quantity of light from the main control section, the laser control section determines the emission conditions of laser light from the error adjustment information stored in the memory and controls the laser light emitting section to emit laser light according to the emission conditions.

COPYRIGHT: (C)2009,JPO&INPIT