| 摘要 |
An electronic device for generating an electric oscillating signal is described based on a micro-electromechanical system (MEMS). The electronic device typically comprises a substrate ( 104 ) a moveable element ( 102 ) which is moveable with respect to the substrate ( 104 ) and an actuating means and a sensor. The actuating means is used to induce vibration of the moveable element ( 102 ) and comprises two inductive elements, a first one provided fixed to the substrate ( 104 ) and a second one provided fixed to the moveable element ( 102 ). The induced vibration of the moveable element ( 102 ) is sensed using the sensor and converted into an electric oscillating signal. The signal may be amplified and used for at least partly powering the actuating means, such that an oscillating signal at a stable resonance frequency and with a fixed amplitude can be obtained. The different components are highly integratable on chip.
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